Puls-Plasma generators bipolar MAGPULS BP

BIPOLAR PULSED POWER SUPPLIES MODEL MAGPULS BP

 

The bipolar pulsed power supplies model MAGPULS BP are constructed for plasma excitation with highest performance. The bipolar pulsed power supply is a modular designed system consisting of the DC power unit and the bipolar pulse unit, which switches the voltage with a freely adjustable pulse of alternating polarity into the plasma system.

 

With a power range from 1kW up to 600KW and the adjustable frequency range from DC up to 100kHz, these pulsed power supplies offer highest flexibility for all Sputter applications and most sophisticated plasma CVD and PVD processes. Unlike many MF generators MAGPULS BP power supplies don’t need any additional matching networks.

 

The highly efficient ARC-management can be adjusted optimally for each deposition process to avoid layer defects effectively in the treated material surface.

 

All pulse and power parameters can be controlled and indicated via the graphik LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.

APPLICATIONS

FEATURES AND BENEFITS

PRODUCT OVERVIEW

APPLICATIONS:

 

The bipolar pulse power supplies model MAGPULS BP are specially designed for all demanding plasma processes with highest performance . With their wide power range and the complete freely adjustable pulse frequency these pulse power supplies are best suited for plasma excitation for creating decorative layers, hard coating layers, manufacturing of flat panels as well as large area sputter coating, especially dual magnetron sputtering, like architectural glass, films and textile coatings.

FEATURES AND BENEFITS:

 

Frequency - and pulse parameters set free for -> universal use of the most plasma positive und negative Output polarity  processes with one power supply

 

5 different pulse mode from DC, unipolar pulse -> flexible adjusting for all kind of process up to bipolar pulse mode  request

 

Voltage control from 10V up to 1000V -> Highest flexibility with Bias coating Processes for plasma pre-treatment by etching or cleaning

 

Precise arc detection and shutdown -> avoid droplets and surface defects

 

Fast DSP-control -> Highest process performance

MODEL MAX. POWER PULS-CURRENT VOLTAGE MAX. DC CURRENT FREQUENCY
MP2-35 6kW 0–35A Pulse 0–1000V 10A DC DC/0.5Hz–100kHz
MP2-60 10kW 0–60A Pulse 0–1000V 20A DC DC/0.5Hz–100kHz
MP2-100 20kW 0–100A Pulse 0–1000V 40A DC DC/0.5Hz–100kHz
MP2-200 40kW 0–200A Pulse 0–1000V 80A DC DC/0.5Hz–100kHz
MP2-400 75kW 0–400A Pulse 0–1000V 150A DC DC/0.5Hz–75kHz
MAGPULS

Stromversogungen

Chief executive:

Dipl. Ing. Dieter Schorn

Im Unterfeld 19

D-76547 Sinzheim

E-Mail.:

info@magpuls.net

Tel.:

+49 (0)7221 987 850

Fax.:

+49 (0)7221 987 454

© Magpuls Stromversorgungs Systeme GmbH