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MAGPULS GmbH: Puls-Plasma generators unipolar

Unipolar Pulsed Power Supplies model MAGPULS UP

The unipolar pulsed Power Supplies are designed in modular technology. The main components of these power supplies are the DC-Power supply and the pulsing unit which generate the pulsed output voltage with adjustable pulse frequency in the range from DC up to 100kHz. The Arc-management with highest efficiency is adjustable for all different Plasma treatment processes and grants a proper layer quality without any layer damages on the surface.

All pulse and power parameters can be controlled and indicated via the graphic LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.

Applications:

The unipolar Pulse power supplies model MAGPULS UP are designed for demanding processes with high plasma ARC behaviour. Due to their wide power range, they provide superior performance and are suitable for the following applications

• Bias Supply for PE-CVD and PVD - Processes
• Pulse plasma nitriding
• Single magnetron sputtering

Features and Benefits:

Frequency - and pulse parameters set free -> universal use of different processes with one generator

Fast ARC detection and shutdown -> avoid droplets and surface defects

Voltage regulation from 10V to 1000V -> Highest flexibility with Bias coating processes for plasma pre-treatment by etching or cleaning

Very fast DSP-control -> Highest process performance

 

Product overview

Model	max. Power	Puls Current	Voltage	max. DC Current	Frequency
MAGPULS 1000/1.5/10 up	1.5kW	0 - 10A Pulse	0 - 1000V	2.4A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/2/15 up	2kW	0 - 15A Pulse	0 - 1000V	2.8A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/3/35 up	3kW	0 - 30A Pulse	0 - 1000V	4.2A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/6/60 up	10kW	0 - 60A Pulse	0 - 1000V	20A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/50/100 up	20kW	0 - 100A Pulse	0 - 1000V	50A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/50/150 up	30kW	0 - 150A Pulse	0 - 1000V	50A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/100/200 up	40kW	0 - 200A Pulse	0 - 1000V	100A DC	DC / 0.5Hz - 100kHz
MAGPULS 1000/120/600 up	100kW	0 - 600A Pulse	0 - 1000V	300A DC	DC  / 0.5Hz - 50kHz
MAGPULS 1000/500/1000 up	200kW	0 - 1000A Pulse	0 - 1000V	600A DC	DC  / 0.5Hz - 50kHz

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Magpuls

Stromversorgungs Systeme GmbH

Dipl. Ing. Dieter Schorn
Chief executive

Im Unterfeld 19
D-76547 Sinzheim

Tel.: +49 (0) 72 21 . 98 78 50
Fax: +49 (0) 72 21 . 98 74 54
E-Mail: info∂magpuls.de