MAGPULS GmbH: Puls-Plasma generators bipolar
Bipolar Pulsed Power Supplies model MAGPULS BP
The bipolar pulsed power supplies model MAGPULS BP are constructed for plasma excitation with highest performance. The bipolar pulsed power supply is a modular designed system consisting of the DC power unit and the bipolar pulse unit, which switches the voltage with a freely adjustable pulse of alternating polarity into the plasma system.
With a power range from 1kW up to 600KW and the adjustable frequency range from DC up to 100kHz, these pulsed power supplies offer highest flexibility for all Sputter applications and most sophisticated plasma CVD and PVD processes. Unlike many MF generators MAGPULS BP power supplies don’t need any additional matching networks.
The highly efficient ARC-management can be adjusted optimally for each deposition process to avoid layer defects effectively in the treated material surface.
All pulse and power parameters can be controlled and indicated via the graphik LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.
Applications:
The bipolar pulse power supplies model MAGPULS BP are specially designed for all demanding plasma processes with highest performance . With their wide power range and the complete freely adjustable pulse frequency these pulse power supplies are best suited for plasma excitation for creating decorative layers, hard coating layers, manufacturing of flat panels as well as large area sputter coating, especially dual magnetron sputtering, like architectural glass, films and textile coatings.
Features and Benefits:
Frequency - and pulse parameters set free for -> universal use of the most plasma positive und negative Output polarity processes with one power supply
5 different pulse mode from DC, unipolar pulse -> flexible adjusting for all kind of process up to bipolar pulse mode request
Voltage control from 10V up to 1000V -> Highest flexibility with Bias coating Processes for plasma pre-treatment by etching or cleaning
Precise arc detection and shutdown -> avoid droplets and surface defects
Fast DSP-control -> Highest process performance
Product overview
Model |
max. Power |
Puls Current |
Voltage |
max. DC Current |
Frequency |
|---|---|---|---|---|---|
| MAGPULS 1000/1.5/10 bp | 1.5kW | 0 - 10A Pulse | 0 - 1000V | 2.4A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/2/15 bp | 2kW | 0 - 15A Pulse | 0 - 1000V | 2.8A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/3/35 bp | 3kW | 0 - 30A Pulse | 0 - 1000V | 4.2A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/6/60 bp | 10kW | 0 - 60A Pulse | 0 - 1000V | 20A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/50/100 bp | 20kW | 0 - 100A Pulse | 0 - 1000V | 50A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/50/150 bp | 30kW | 0 - 150A Pulse | 0 - 1000V | 50A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/100/200 bp | 40kW | 0 - 200A Pulse | 0 - 1000V | 100A DC | DC / 0.5Hz - 100kHz |
| MAGPULS 1000/150/400 bp | 60kW | 0 - 400A Pulse | 0 - 1000V | 150A DC | DC / 0.5Hz - 75kHz |
| MAGPULS 1000/200/600 bp | 100kW | 0 - 600A Pulse | 0 - 1000V | 200A DC | DC / 0.5Hz - 75kHz |
Magpuls
Stromversorgungs Systeme GmbH
Dipl. Ing. Dieter Schorn
Chief executive
Im Unterfeld 19
D-76547 Sinzheim
Tel.: +49 (0) 72 21 . 98 78 50
Fax: +49 (0) 72 21 . 98 74 54
E-Mail: info∂magpuls.de
Bipolar-Pulse Power Supplies
series MAGPULS BP
