MAGPULS GmbH: DC-Sputter power supplies
DC-Sputter Power Supplies
The DC-sputter power supplies are very compact built switched mode power supplies in the power range from 1kW up to 30kW DC. The generators are ideal for powering small magnetrons in production and laboratory facilities as well as in large-area magnetron coating for the deposition of conductive materials.
The integrated ARC-handling works extremely quick and automatic. In parallel operation the output power can be increased up to 240kW. Thanks to a special circuit arrangement a "Master-Slave-Wiring" is not necessary.
Applications:
The DC-sputter power supplies are suitable for simple magnetron sputtering, for single- and dual-magnetron sputtering for deposition of electrically conductive substrates, such as: coating of solar glass or architectural glass.
Features and Benefits:
Fast ARC-Handling -> Higher productivity
Very high compact construction at high -> Easy integration at existing systems power density
Proved analogue technology -> High reliability
Product overview
Model |
max. Power |
Voltage |
max. DC Current |
cooling |
|---|---|---|---|---|
| MAGS 15/1000 | 1.5kW | 0 - 1000V | 2.4A DC | air |
| MAGS 20/1000 | 2kW | 0 - 1000V | 2.8A DC | air |
| MAGS 30/1000 | 3kW | 0 - 1000V | 4.2A DC | air |
| MAGX 80/1000 | 8kW | 0 - 1000V | 16A DC | water |
| MAGX 100/1000 | 10kW | 0 - 1000V | 20A DC | water |
| MAGX 150/1000 | 15kW | 0 - 1000V | 30A DC | water |
| MAGSW 200/1000 | 20kW | 0 - 1000V | 35A DC | water |
| MAGSW 300/1000 | 30 kW | 0 - 1000V | 50A DC | water |
Magpuls
Stromversorgungs Systeme GmbH
Dipl. Ing. Dieter Schorn
Chief executive
Im Unterfeld 19
D-76547 Sinzheim
Tel.: +49 (0) 72 21 . 98 78 50
Fax: +49 (0) 72 21 . 98 74 54
E-Mail: info∂magpuls.de
DC-Sputter Power Supplies
